JPS6190854U - - Google Patents
Info
- Publication number
- JPS6190854U JPS6190854U JP17242184U JP17242184U JPS6190854U JP S6190854 U JPS6190854 U JP S6190854U JP 17242184 U JP17242184 U JP 17242184U JP 17242184 U JP17242184 U JP 17242184U JP S6190854 U JPS6190854 U JP S6190854U
- Authority
- JP
- Japan
- Prior art keywords
- flat
- engages
- processing apparatus
- vacuum processing
- circumferential surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17242184U JPH037391Y2 (en]) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17242184U JPH037391Y2 (en]) | 1984-11-15 | 1984-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190854U true JPS6190854U (en]) | 1986-06-12 |
| JPH037391Y2 JPH037391Y2 (en]) | 1991-02-25 |
Family
ID=30730087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17242184U Expired JPH037391Y2 (en]) | 1984-11-15 | 1984-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037391Y2 (en]) |
-
1984
- 1984-11-15 JP JP17242184U patent/JPH037391Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037391Y2 (en]) | 1991-02-25 |